ELECTRON BEAM WRITING ERASURE SWITCHES
نویسندگان
چکیده
منابع مشابه
Molecule-by-molecule writing using a focused electron beam.
The resolution of lithography techniques needs to be extended beyond their current limits to continue the trend of miniaturization and enable new applications. But what is the ultimate spatial resolution? It is known that single atoms can be imaged with a highly focused electron beam. Can single atoms also be written with an electron beam? We verify this with focused electron-beam-induced depos...
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ژورنال
عنوان ژورنال: Le Journal de Physique Colloques
سال: 1988
ISSN: 0449-1947
DOI: 10.1051/jphyscol:19884169